Exploring multielement films means tracking phase formation, magnetic response, conductivity, microstructure, and process sensitivity across a large composition space.
Building multielement thin-film libraries, measuring registered composition points, and mapping structure and selected properties across the wafer.
Up to seven co-sputtered elements; composition gradients; XRF or EDX/WDX; XRD; magnetic or electrical screening where scoped; data-guided follow-up.
Useful material regions are highlighted for repeat samples, uniform films, device-adjacent tests, or deeper scientific evaluation. Isolated sample anecdotes become a measured map.